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News Breaks | | | | December 4, 2012 | | 08:04 EDT |  | ACLS, LRCX | Axcelis, Lam Research enter strategic collaboration agreement
Axcelis (ACLS) and Lam Research (LRCX) announced a strategic collaboration agreement focusing on the interrelationship between ion implantation, etch processes, and photoresist strip applications, including material modification implants and high-dose implant strip. Separately, Axcelis decided that it will exit the dry-strip business and divest its dry-strip intellectual property and technology, including the advanced non-oxidizing process technology of its Integra product line, to Lam Research, allowing Axcelis to focus exclusively on the ion implant market. Axcelis will continue to ship its 300 mm dry-strip products through August 2013, and support the large Axcelis installed base indefinitely, including all existing parts and service contracts. | |
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News For ACLS;LRCX From The Last 14 Days Check below for free stories on ACLS;LRCX the last two weeks. |
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| May 16, 2013 | | 08:02 EDT | | ACLS | Axcelis receives significant order from leading chip manufacturer worth $1.4M
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